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In-Line Critical Leak Rate Testing of Vacuum-Sealed and Backfilled Resonating MEMS Devices
In-Line Critical Leak Rate Testing of Vacuum-Sealed and Backfilled Resonating MEMS Devices
2006
Wolfgang Reinert
Peter Metz
Marten Oldsen
Dirk Kähler
Keywords:
Leak
Composite material
Microelectromechanical systems
Vacuum packing
Materials science
Optoelectronics
leak rate
Correction
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