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2016 SYMPOSIUM ON DESIGN, TEST, INTEGRATION AND PACKAGING OF MEMS/MOEMS (DTIP)
2016 SYMPOSIUM ON DESIGN, TEST, INTEGRATION AND PACKAGING OF MEMS/MOEMS (DTIP)
2016
Noor Amalina Ramli
Tughrul Arslan
Nakul Haridas
Wei Zhou
Keywords:
Control engineering
Electronic engineering
Microelectromechanical systems
Materials science
Variable capacitor
Electrical engineering
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