Experimental study on measurement of free-form surface with wavefront reconstruction algorithm

Abstract In this paper, a triangulation interpolation wavefront reconstruction algorithm is proposed to measure the full aperture map of the free-form surface. Based on the method we proposed, the free-form surface can be reconstructed with the scanning white light interferometry (SWLI). Applying the triangulation interpolation wavefront reconstruction algorithm, we provide an experimental demonstration by testing a 318mm*288mm free-form surface in a rectangular shape. By comparing reconstruction results with computer-generated hologram (CGH) compensation testing result, it proves that the surface map can be got with high precision by using the wavefront reconstruction algorithm. In addition, we also test the free-form surface with a probe in contact measurement mode. It shows that with the white light scanning interferometry method, the surface map can be reconstructed with greater efficiency.