Development Of A Hybrid Piezoelectric And Pneumatic Miniature Optical Scanner For Endoscopic Applications

Abstract Gastrointestinal (GI) cancers are among some of most significant public health issues worldwide. Early cancer diagnosis will increase GI cancer patients’ survival rate, however, developing endoscopes for early cancer detection is a challenge as it is difficult to design a high-resolution optical scanner. In this paper, we report a new 3D optical scanner using piezoelectric (for in-plane, X-Y axes) and pneumatic (for out-of-plane, Z-axis) mechanisms. Feedback control is implemented to reduce disturbances and provide a stable position for the pneumatic actuator. The scanner shows a Z and X-Y resolution of 1.5 μm and 1.4 μm, respectively. The field-of-view (FOV) is around 100×100 (μm)2, with a frame rate of 1.25 fps (frame per second). Paper fiber, and onion epidermis images were obtained by the new optical scanner.