Materials science of microelectromechanical systems (MEMS) devices IV

In recent years, microelectromechanical systems (MEMS) have successfully acceded to several markets, including pressure sensors, gyroscopes, accelerometers, fluidics and data storage, representing a total revenue of some $2 billion in 2000. However, MEMS has the potential to offer reliable and cost-effective solutions to many other fields. In fact, current market predictions place the total sales of MEMS devices in excess of $7 billion in 2005. The current expectation, then, is that we will witness in the near future the appearance of diverse MEMS structures for power generation, propulsion, biomedical applications, optical switching, infrared sensing, microphones and displays, to name just a few. This plethora of activity is possible due to the increased understanding of the properties of the micromanufacturing materials involved, the availability of processing equipment with enhanced capabilities, and the effort of a large number of researchers and scientists. This fourth volume in a popular series from MRS focuses on the materials science of MEMS structures and the films involved to create those structures. Although much remains to be done and understood, the current market penetration of MEMS devices already demonstrates that the effort has proceeded in the right direction. Topics include: applications metrology; mechanical properties; microstructure and processing; applications; processing techniques; alternative materials; and surface engineering issues in MEMS structures and devices.