Micro-pore polishing equipment and micro-pore polishing process for abrasive particle flow

The invention discloses micro-pore polishing equipment for an abrasive particle flow. The micro-pore polishing equipment comprises a clamp, a base plate, a through-hole-shaped cavitation cavity, a high-transparency laser protection lens, a laser device, a focusing lens and an abrasive material guide channel, wherein the clamp is used for clamping a workpiece and positioning a micro-pore to be polished in the workpiece; the base plate is mounted on the clamp; the cavitation cavity is arranged on the base plate and is correspondingly communicated with the micro-pore in the workpiece; the high-transparency laser protection lens covers one side, opposite to the workpiece, of the cavitation cavity; the laser device can generate a laser beam towards the cavitation cavity; the focusing lens is arranged between the laser device and the high-transparency laser protection lens and can be used for focusing the laser beam into the cavitation cavity; the abrasive material guide channel can be used for leading pressure abrasive particle fluid into the cavitation cavity. By adopting the micro-pore polishing equipment, laser is continuously and periodically focused on the fluid to form cavitation; generated great partial pressure and a jet flow for pushing the abrasive particle flow to the micro-pore are used for continuously pushing the abrasive particle flow to flow in the micro-pore at a high speed and abrade the pore wall of the micro-pore, so that the super-precision and high-efficiency polishing is carried out on the micro-pore. The invention further discloses a micro-pore polishing process for the abrasive particle flow. By using the method disclosed by the invention, the super-precision and high-efficiency polishing can be carried out on the micro-pore.