The stopping cross-section of aluminum for He ions

Abstract The stopping cross-section of Aluminum for He ions has been determined from experimental Rutherford Backscattering (RBS) spectra of bulk and thick film samples by using a Bayesian inference data analysis method. This method allows for the extraction of continuous stopping curves together with a consistent estimate of the errors. The valid energy range of the present parameterization is 0.3–3.0 MeV. The contribution of the plural scattering on the RBS yield at low energy has been measured on thick film samples and it has been observed that a double scattering (DS) calculation is not sufficient to reproduce the low energy background. Nevertheless, the low energy yield of the bulk spectra could be used to reject a class of unphysical simulations, where the calculated low energy yield is significantly larger than the experimental data.