Coupling and Assembly Elements Using Microfabrication Technologies

Marius Popa,Cristinel Ilie,Daniel Lipcinski,Ionel Chirita,Nicolae Tănase,Simona Emilia Apostol

Coupling and Assembly Elements Using Microfabrication Technologies

2017

Marius Popa
Cristinel Ilie
Daniel Lipcinski
Ionel Chirita
Nicolae Tănase
Simona Emilia Apostol

The purpose of this paper is to presents the conception, achievements, measurement and data analysis regarding the connecting and the assembling of the components of a MEMS electromagnetic microactuator, cantilever type.

Keywords:

Engineering
Control engineering
Cantilever
Microfabrication
Microelectromechanical systems
Microactuator
Coupling
Mechanical engineering
experimental validation

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