Design and Fabrication Technology for Arrays for Vertical-Cavity Surface-Emitting Lasers

The design and fabrication technology for integrated arrays for vertical-cavity surface-emitting lasers with bottom AlGaAs/GaAs semiconductor and top AlGaO/GaAs distributed Bragg reflectors is suggested. Arrays containing 8×8 lasers with an active region based on two InGaAs quantum wells were produced. Individual emitters with an oxidized aperture of 8–10 μm in diameter demonstrate cw lasing at 960–965 nm at room temperature, with a threshold current of 1.0–2.5 mA, external efficiency of up to 0.4 mW/mA, and a maximum output power of over 2 mW.