Effect of Zinc Precursor on Interdigitated Electrode using Electrochemical Deposition Method

In this paper, a thin film were deposited on Interdigitated Electrodes (IDE) by using Electrochemical Deposition (ECD) method. Thin film consist of zinc nitrate (Zn(NO 3 ) 2 ) or zinc acetate (ZnC 4 H 6 O 4 ) precursors has been used in this work. Humidity sensors generally has three basic types which is resistive, capacitive and thermal. Materials such as porous ceramic, electrolytes, polymers are being used for humidity sensors. This research is to investigate the performance of the precursors as humidity sensor applications. Then, it's humidity sensing properties and electrical properties were observed. For the ECD process, different durations deposition time were set as the changes variable which are 500s, 2000s and 3500s. Electrical measurements were conducted at room temperature to evaluate the device's response on known relative humidity levels which is from 40%RH to 90%RH. It was found that, between the two precursors, sample with zinc nitrate precursor showing better performance in term of resistivity and also sensitivity towards humidity.