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The effects of ICP dry etching and HF wet etching on the morphology of SiO2 surface
The effects of ICP dry etching and HF wet etching on the morphology of SiO2 surface
2018
Kazy Shariar
Jie Zhang
Keith Coasey
Abu Sufian
Roddell Remy
Jing Qu
Michael Mackay
Yuping Zeng
Keywords:
Dry etching
Etching (microfabrication)
Materials science
Inorganic chemistry
Chemical engineering
Morphology (linguistics)
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