X-ray KBA microscopic imaging system

2012 
The invention relates to an X-ray KBA (Kirkpatrick-Baez Advanced) microscopic imaging system, which comprises an object lens M1, an object lens M2, an object lens M3, an object lens M4, an optical prism piece N1 and an optical prism piece N2, wherein working reflection surfaces of the object lens M1 and the object lens M2 in the meridian direction push against a T1 surface and a T2 surface of the optical prism piece N1, which are adjacent to each other and form an included angle of eta1; and working reflection surfaces of the object lens M3 and the object lens M4 in the sagittal direction push against a T3 surface and a T4 surface of the optical prism piece N2, which are adjacent to each other and form an included angle of eta2. Compared with the prior art, the X-ray KBA microscopic imaging system is simple in structure, and does not have accuracy requirements on angles and thicknesses of the working reflection surfaces and the back, the processing difficulty and cost of optical elements of the KBA system are reduced greatly, and the assembling accuracy and the ultimate imaging quality of the KBA system are improved.
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