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Benchmarking Ge1-xSnx CVD Epitaxy using GeH4 and Ge2H6
Benchmarking Ge1-xSnx CVD Epitaxy using GeH4 and Ge2H6
2016
Anurag Vohra
Roger Loo
David Kohen
Joe Margetis
John Tolle
Daniela Stange
D. Buca
Wilfried Vandervorst
Keywords:
Benchmarking
Analytical chemistry
Epitaxy
Materials science
Engineering physics
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