Old Web
English
Sign In
Acemap
>
Paper
>
Si-substrate-based High Mobility Ge-pMOSFETs Using Ozone Passivated Al2O3/GeOx Gate Dielectric
Si-substrate-based High Mobility Ge-pMOSFETs Using Ozone Passivated Al2O3/GeOx Gate Dielectric
2014
Shengkai Wang
Xu Yang
Zhujing Gong
Bing Sun
Wei Zhao
changhudong
Honggang Liu
Keywords:
Gate dielectric
Substrate (chemistry)
Analytical chemistry
Materials science
Ozone
Optoelectronics
si substrate
Correction
Source
Cite
Save
Machine Reading By IdeaReader
0
References
0
Citations
NaN
KQI
[]