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Formation Mechanism of Cobalt Silicide by Solid Phase Reaction in Co/Ti/Si system
Formation Mechanism of Cobalt Silicide by Solid Phase Reaction in Co/Ti/Si system
1996
Seung Heon Lee
Jun-Cheol Bae
Dong-Won Sin
Chan-Gyeong Park
Keywords:
Materials science
Metallurgy
Cobalt
Silicide
cobalt silicide
phase reaction
Correction
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