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Detection and analysis of airborne acoustic signals in direct laser interference patterning
Detection and analysis of airborne acoustic signals in direct laser interference patterning
2021
Tobias Steege
Sabri Alamri
Andrés Fabián Lasagni
Udo Klotzbach
Tim Kunze
Keywords:
Materials science
Acoustic emission
Optics
Autofocus
laser interference
Correction
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