Two-dimensional simulation of an electron cyclotron resonance plasma source with power deposition and neutral gas depletion

Using an improved two-dimensional hybrid model with microwave absorption and neutral gas transport, the properties of an electron cyclotron resonance (ECR) plasma have been investigated. Results indicate that there are two typical profiles of microwave power deposition and neutral gas density over the entire calculated parameter range: one is concentrated near the centre, and decreases with radial positions; another is a hollow distribution. The average value of neutral gas density in the source area is about 50-60% of that in the downstream region. The dependence of plasma parameters such as plasma density, electron temperature and ionization rate, and the ion angle distribution function at the substrate surface on the position and pressure were discussed. Results of our simulation can be compared qualitatively with many experimental measurements.