Investigation on influence of deposition rate of YBa2Cu3O7−δ superconducting film prepared on Hastelloy C276 substrate by spray atomizing and coprecipitating laser chemical vapor deposition

Abstract YBa 2 Cu 3 O 7 − δ (YBCO) films were prepared at deposition rates ranging from 10 to 55μm h −1 on CeO 2 /LaMnO 3 /MgO/Gd 2 Zr 2 O 7 /Hastelloy C276 substrate by spray atomizing and coprecipitating laser chemical vapor deposition. At a deposition rate of 10 μm h −1 , a c -axis-oriented YBCO film with a high critical temperature ( T C ) of 91 K and critical current density ( J C ) of 2.4 MA cm −2 was prepared, which showed an epitaxial growth mode of YBCO [001]//CeO 2 [100] (YBCO [100]//CeO 2 [011]). The full width at half maximum (FWHM) of the ω -scan and that of the φ -scan of the YBCO film were 1.9° and 3.2°, respectively. At a deposition rate of 45 μm h −1 , an a -axis-oriented YBCO film with a T C of 78 K and a J C of 0.4 MAcm −2 was obtained. The YBCO film showed an epitaxial growth mode of YBCO [100]//CeO 2 [100] (YBCO [001]//CeO 2 [011]) and had the FWHM of 4.9° for the ω -scan and that of 9.5° for the φ -scan, respectively.