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Temperature Dependence of TaSiN Thin Film Resistivity from Room Temperature to 900℃ : Semiconductors
Temperature Dependence of TaSiN Thin Film Resistivity from Room Temperature to 900℃ : Semiconductors
2001
Munenori Oizumi
Katsuhiro Aoki
Yukio Fukuda
Keywords:
Condensed matter physics
Amorphous solid
Thin film
Analytical chemistry
Semiconductor
Physics
Electrical resistivity and conductivity
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