Microscopic field emission investigation of nanodiamond and AlN coated Si tips

We have investigated the suitability of nanodiamond (ND) and AlN coated Si tip arrays for cold cathodes by means of a field emission scanning microscope combined with scanning electron microscopy. The ND coated tips required an average extraction voltage U(10 nA) of 360 V for 10 μm electrode distance and yielded stable emission up to currents of 10–50 μA. The rather nonuniform emission distribution of the arrays (80 V

Keywords:

• Analytical chemistry
• Scanning electron microscope
• Field electron emission
• Diamond
• Electrode
• Annealing (metallurgy)
• Cathode
• Nanodiamond
• Chemistry
• Silicon

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