Research on pressure control for cascaded atmospheric pressure simulation system

Taking the atmospheric pressure simulation system (APSS) as the research object, the reasons of the pressure control performance degradation of the single-stage APSS affected by the change of working point in low pressure range are analyzed. In order to improve the pressure control performance, the cascaded APSS is proposed instead of the single-stage APSS. Research results show that the proposed cascaded APSS can overcome the shortcoming of the single-stage APSS, and greatly enhance the pressure control performance in the scope of low pressure.