Ultra-high resistive and anisotropic CoPd–CaF2 nanogranular soft magnetic films prepared by tandem-sputtering deposition

Abstract Ultra-high resistive and anisotropic soft magnetic films for gigahertz applications are desirable to demonstrate the really practical films. Here we present a study of novel nanogranular films fabricated by tandem-sputtering deposition. Their electromagnetic properties and nanostructure have also been discussed. These films consisted of nanocrystallized CoPd alloy-granules and CaF 2 matrix, and a specimen having a composition of (Co 0.69 Pd 0.31 ) 52 –(Ca 0.31 F 0.69 ) 48 exhibited distinct in-plane uniaxial anisotropy after uniaxial field annealing with granule growth. Its complex permeability spectra have a ferromagnetic resonance frequency extending to the Super-High-Frequency band due to its higher anisotropy field, and its frequency response was quite well reproduced by a numerical calculation based on the Landau–Lifshitz–Gilbert equation. Furthermore, it was clarified that the CaF 2 -based nanogranular film exhibits a hundredfold higher electrical resistivity than conventional oxide or nitride-based films. Higher resistivity enables the film thickness to achieve a margin exceeding threefold against eddy current loss. The greater resistivity of nanogranular films is attributed to the wide energy bandgap and superior crystallinity of CaF 2 matrix.