2D silicon nanopillars arrays for photonics

Lyudmila S. Golobokova,Yuri V. Nastaushev,F. N. Dultsev,N. V. Kryzhanovskaya

2D silicon nanopillars arrays for photonics

2015

Lyudmila S. Golobokova
Yuri V. Nastaushev
F. N. Dultsev
N. V. Kryzhanovskaya

In this paper, particularities of ordered silicon nanopillars (Si NP) arrays formation by mean electron beam lithography and dry etching were studied. The optical and electrical properties of the Si NPs were investigated.

Keywords:

Dry etching
Optical imaging
Passivation
Hybrid silicon laser
Photonics
Electron-beam lithography
Nanotechnology
Analytical chemistry
Nanopillar
Silicon
Materials science
Etching

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