Experimental determination of electronic stopping for ions in silicon dioxide

The electronic energy loss for He4, Li7, Be9, C12, O16, F19, and Si28 ions in self-supporting silicon dioxide foils has been measured over a continuous range of energies. The measured He stopping powers are in good agreement with the SRIM-2003 (Stopping and Range of Ions in Matter) prediction. In the case of Li and C ions, the measured stopping powers exhibit some deviation from the SRIM-2003 predictions only around the Bragg peak; however, for Be, O, F, and Si ions, the measure stopping powers exhibit up to 10% deviation from the SRIM-2003 predictions over the entire energy range. The results indicate that the modified Bohr formula is suitable for scaling the stopping number for C and heavier ions in the classical interaction regime.