Structural and Optical Properties of Porous SiGe/Si Multilayer Films

Bi Zhou,Xuemei Li,Shuwan Pan,Songyan Chen,Cheng Li,Songyan Chen,licheng

Structural and Optical Properties of Porous SiGe/Si Multilayer Films

2011

Bi Zhou
Xuemei Li
Shuwan Pan
Songyan Chen
Cheng Li
Songyan Chen
licheng

Conference Name:10th China Semiconductor Technology International Conference 2011, CSTIC 2011. Conference Address: Shanghai, China. Time:March 13, 2011 - March 14, 2011.

Keywords:

Chemical vapor deposition
Nanotechnology
X-ray crystallography
Porosity
Semiconductor
Molecular physics
Materials science
semiconductor technology
Luminescence

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