Dielectric Breakdown and Failure of Ferroelectric Films as the Dielectric for Electrowetting Systems

In this paper, we study the electrical properties and breakdown phenomena of PZT ferroelectric thin film in electrowetting systems. The experimental results indicate that irreversible charge trapping occurred with repeated voltage actuation, resulting in contact angle relaxation and reduction of the ferroelectric film breakdown strength. The breakdown voltage depends on DC voltage polarity, and this polarity dependence was found to be related to the thickness of the ferroelectric layer. When AC voltage was applied, the breakdown voltage increased directly with voltage frequency. These phenomena are interpreted in terms of electrochemical reactions at the liquid/solid interface, an empirical model was used to estimate the amount of trapped charge in the ferroelectric film.