Sealing method of dry etched AlAs/GaAs top mirrors in vertical cavity surface emitting lasers

A versatile sealing process for AlAs layers is presented. This sealing prevents the AlAs layers of AlAs/GaAs top distributed Bragg reflectors from further undesired oxidation during the wet oxidation of the AlAs current constriction layers in vertical cavity surface emitting lasers. This method has been successfully applied to protect the etched pillars in top mirrors although those pillars were plasma dry etched. © 1999 The Electrochemical Society. S1099-0062(98)07-019-9. All rights reserved.