Chemical Solution Deposition of Epitaxial Indium- and Aluminum-Doped Ga2O3 Thin Films on Sapphire with Tunable Bandgaps

The authors would like to thank KAUST Baseline Funds BAS/1/1664-01-01, Competitive Research Grants URF/1/3437-01-01 and URF/1/3771-01-01, and GCC Research Council REP/1/3189-01-01 for their support.