DESIGN AND ANALYSIS OF X-Y-θ θ θ θ POSITIONING STAGE BASED ON REDUNDANT PARALLEL LINKAGE

This paper presents the concept of a planar positio ning stage based on a kinematically redundant paral lel linkage. Basic kinematics and workspace analysis of base redundant manipulato r is initially explained and the procedure of static analysis to predict the actuated joint torques is described. As there are s ix actuators in the linkage, the redundancy can be overcome by proper selection of the base joint variables. Also it is assumed that tis at a constant speed. A numerical exam ple is shown with a straight line trajectory to illustrate the workspace and joint fo rce calculation aspects of this linkage. The possib le arrangement of the stage with electrostatic actuation and sensing are finally hig hlighted.