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Novel fabrication of fixed suspended silicon nitride structure for MEMS devices with dry etching
Novel fabrication of fixed suspended silicon nitride structure for MEMS devices with dry etching
2020
Khawaja Nizammuddin Subhani
Shubham Khandare
R. C. Biradar
K N Bhat
Keywords:
Dry etching
Silicon nitride
Materials science
Fabrication
Optoelectronics
Microelectromechanical systems
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