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Influence of the substrate bias on the stress in Ti-DLC films deposited by dc magnetron sputtering
Influence of the substrate bias on the stress in Ti-DLC films deposited by dc magnetron sputtering
2020
S. Ponce
N Z Calderon
J L Ampuero
A. La Rosa Toro
A. Talledo
W. Gacitúa
B. R. Pujada
Keywords:
Materials science
Sputter deposition
Substrate (chemistry)
Optoelectronics
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