71.2: Distinguished Paper: iMoD™ Display Manufacturing

Philip D. Floyd,David Heald,Brian W. Arbuckle,Alan Lewis,Manish Kothari,Brian J. Gally,Bill Cummings,Bangalore R. Natarajan,Lauren Palmateer,Jan Bos,Daniel Chang,Jedi Chiang,Denny Chu,Li-Ming Wang,Edmon Pao,Fritz Y F Su,Vincent Huang,Wen-Jian Lin,Wen-Chung Tang,Jia-Jiun Yeh,Chen-Chun Chan,Fang-Ann Shu,Yuh-Diing Ju

71.2: Distinguished Paper: iMoD™ Display Manufacturing

2006

QUALCOMM has developed and transferred to manufacturing iMoD Displays, a MEMS-based reflective display technology. The iMoD array architecture allows for development at wafer scale, yet easily scales-up to enable fabrication on flat-panel display (FPD) lines. In this paper, we will describe the device operation, process flow and fabrication, technology transfer issues, and display performance.

Keywords:

Architecture
Manufacturing engineering
Microelectromechanical systems
Wafer
Engineering
Next generation of display technology
Electrical engineering
technology transfer
Fabrication
Engineering drawing

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