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Microwave plasma apparatus for deposition of hydrogenated amorphous carbon layers
Microwave plasma apparatus for deposition of hydrogenated amorphous carbon layers
1991
K. Hammer
S. Roth
B. Mainz
Olaf Stenzel
W. Scharff
W. Dworschak
R. Kleber
A. Krüger
K. Jung
H. Ehrhardt
Keywords:
Radiochemistry
Plasma processing
Amorphous carbon
Ion source
Materials science
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