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Diagnostics for an inductively coupled plasma in highly Ar-diluted oxygen
Diagnostics for an inductively coupled plasma in highly Ar-diluted oxygen
2006
Zhang Yong
Satoshi Hirao
Takeshi Ohmori
Takeshi Kitajima
Toshiaki Makabe
Keywords:
Oxygen
Analytical chemistry
Inductively coupled plasma
Inductively coupled plasma mass spectrometry
Chemistry
Inductively coupled plasma atomic emission spectroscopy
Materials science
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