Microwave Discharges: Fundamentals and Applications

[Abstract] The main parameters and properties of an electrodeless freely localized microwave discharge and a surface microwave discharge are experimentally investigated . It is shown, that plasma of a surface microwave discharge at low air pressure is especially non -equilibrium. Electron energy distribution function essentially differs from equilibrium function and strongly enriche s by fast electrons. It is shown, that the microwave discharges result in a reliable ignition of hydrocarbon fuel. The micro wave discharges may find applications in different fields of a supersonic plasma aerodynamics and in development of new -generation plasma sources for plasma chemistry, nano - and micro electronics purposes (plasma treat ment of surfaces, etching, and film de position), and so on.