Micromachining of polydimethylsiloxane using EUV light

Shintaron Fukami,Shuichi Torii,Tetsuya Makimura,Kota Okazaki,Daisuke Nakamura,Akihiko Takahashi,Tatsuo Okada,Hiroyuki Niino,Koichi Murakami

Micromachining of polydimethylsiloxane using EUV light

2013

Shintaron Fukami
Shuichi Torii
Tetsuya Makimura
Kota Okazaki
Daisuke Nakamura
Akihiko Takahashi
Tatsuo Okada
Hiroyuki Niino
Koichi Murakami

We studied the method to fabricate microstructures in PDMS sheet using laser-generated EUV light. In the high power density EUV light irradiation region, PDMS can be machined without chemical modification.

Keywords:

Optoelectronics
Synchrotron radiation
Irradiation
Optics
Attenuation coefficient
Surface micromachining
Polydimethylsiloxane
Chemical modification
Physics
Laser beam machining
Extreme ultraviolet lithography
Extreme ultraviolet
high power density

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