Transformation of (0002)-oriented Ti film into (111)TiN through nitrogen implantation

Nitrogen implantation into a (0002)-oriented Ti film has resulted in a systematic deformation of the hcp host with implantation dose. Grazing-incidence X-ray diffraction study shows an increase in interplanar spacing of the (0002) and the (10\(\)3) planes as a function of nitrogen concentration. The diffractograms indicate a smooth change of (0002) plane of the host into (111) of the δ-TiN. Strain in the hcp cell was found to be proportional to the nitrogen concentration. The results provide evidence for a strain-driven ‘martensite-like restacking’ formation of TiN compound.