Structural Properties of Dielectric Barrier Reactor with Hole (DBH) for CF 4 Decomposition

2003

In this paper, the decomposition efficiency is investigated for three simulated plasma reactors that are needle plate reactor, metal particle reactor, and dielectric barrier reactor with hole (DBH). The decomposition efficiency by DBH is much better than that by needle plate reactor or metal particle reactor. When applied voltage is increased up to the critical voltage for spark formation in the all reactors, the decomposition efficiency is increased. The decomposition efficiency in needle plate reactor and metal particle reactor is about and respectively at applied voltage of 23 kV (consumption power: 110 W) and concentration of 500 ppm, however, the decomposition efficiency is more than in case of DBH. DBH should be much better than two reactors investigated for decomposition.

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