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Shaped comb fingers for tailored electro-mechanical restoring force.
Shaped comb fingers for tailored electro-mechanical restoring force.
2003
Katsuo Kurabayashi
Senol Mutlu
Samuel Lee Miller
Brian D. Jensen
James J. Allen
Keywords:
Restoring force
Nanotechnology
Electromechanics
Engineering
microelectronic circuits
Correction
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