Vacuum transfer equipment used for preparation of van der Waals heterojunctions made by two-dimensional material

The invention relates to vacuum transfer equipment used for preparation of van der Waals heterojunctions made by two-dimensional material. According to one embodiment, the vacuum transfer equipment comprises a vacuum cavity, a two-dimensional driving module, a two-dimensional driving rod which is installed on the vacuum cavity and comprises a two-dimensional driving rod extending to the vacuum cavity and a four-dimensional sample driving module. The two-dimensional driving rod extends to the tail end of the vacuum cavity and is used for supporting a first sample. The four-dimensional sample driving module is installed on the vacuum cavity and comprises a four-dimensional driving rod extending to the vacuum cavity. The four-dimensional driving rod extends to the tail end of the vacuum cavity and is used for supporting a second sample. The two-dimensional driving rod can adjust the position of the first sample in the two-dimensional plane. The four-dimensional driving rod can adjust the position of a second sample in the three-dimensional space and can rotate the second sample by rotating around a shaft vertical to the two-dimensional plane such that the first sample can be attached to the second sample.