Structured CAD methodology for integrated MEMS and IC design

MEMS design tools are increasingly important as micro systems find wider applications. Though established structured design methodologies are in place for VLSI design, these tools cannot be applied to MEMS design without adaptation. Several needs must be met to enable MEMS design: (1) non-linear, dynamic and multi-energy domain design and simulation; (2) expression of complex and curvilinear geometries; (3) arbitrary orientation and placement of MEMS components; and (4) comprehensive, 3D visualization and analyses.