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HZO thin film grown by mist chemical vapor deposition and evaluation of their electrical characteristics
HZO thin film grown by mist chemical vapor deposition and evaluation of their electrical characteristics
2020
Yuki Fujiwara
Daisuke Tahara
Hiroyuki Nishinaka
Masahiro Yoshimoto
Minoru Noda
Keywords:
Chemical vapor deposition
Ferroelectricity
Materials science
Thin film
Chemical engineering
Mist
Correction
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