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Non-Evaporable Getter (NEG) Coating Using Titanium and Palladium Vacuum Sublimation
Non-Evaporable Getter (NEG) Coating Using Titanium and Palladium Vacuum Sublimation
2018
Tetsuya Miyazawa
Kensuke Tobishima
Hiroo Kato
Masashi Kurihara
S. Ohno
Takashi Kikuchi
Kazuhiko Mase
Keywords:
Titanium
Non-Evaporable Getter
Thin film
Composite material
Sublimation (phase transition)
Coating
Palladium
Materials science
Metallurgy
vacuum sublimation
Correction
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