Old Web
English
Sign In
Acemap
>
Paper
>
Effects of Magnetic Fields and Excited Plasma Species on Silicon Oxide Film Formation by Microwave Plasma CVD
Effects of Magnetic Fields and Excited Plasma Species on Silicon Oxide Film Formation by Microwave Plasma CVD
1988
Takuya Fukuda
Kazuo Suzuki
Yasuhiro Mochizuki
Michio Ohue
Naohiro Momma
Tadashi Sonobe
Keywords:
Atomic physics
Plasma
Magnetic field
Excited state
Silicon oxide
Materials science
Ion source
Correction
Source
Cite
Save
Machine Reading By IdeaReader
0
References
0
Citations
NaN
KQI
[]