Tunable Picosecond Deep-UV Laser System for Semiconductor Inspection at 213 nm

Kentaro Miyata,Akihiro Tanabashi,Louis Desbiens,Vincent Roy,Yves Taillon,Mizuki Mohara,Kei Shimura,Shinichi Nakayama,Satoshi Wada

Tunable Picosecond Deep-UV Laser System for Semiconductor Inspection at 213 nm

2019

Kentaro Miyata
Akihiro Tanabashi
Louis Desbiens
Vincent Roy
Yves Taillon
Mizuki Mohara
Kei Shimura
Shinichi Nakayama
Satoshi Wada

We report a high-repetition-rate, picosecond fiber master-oscillator and power-amplifier system operating at 120 and 240 MHz in the pulse range of 28-87 ps and its fifth-harmonic generation for semiconductor inspection at 213 nm.

Keywords:

Laser
Pulse (signal processing)
Semiconductor
Optoelectronics
Picosecond
Fiber
Materials science
uv laser
Semiconductor laser theory

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