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プラズマ援用研磨による4H-SiC (0001)表面の高品位仕上げ加工
プラズマ援用研磨による4H-SiC (0001)表面の高品位仕上げ加工
2011
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Keywords:
Lapping
Atmospheric-pressure plasma
Silicon carbide
Materials science
Metallurgy
Correction
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