for sub-ppb VOC detection in air quality monitoring applications

Micromachining technology fortheminiaturization of gas-chromatographic (GC)components together with innovative pre-concentration materials areusedforthe development ofaportable sub-ppb level monitoring system for aromatic volatile organic compounds(VOC).The high sensitivity ofMetalOxideSemiconductor (MOX)gassensors is combinedwithGC techniques toincrease selectivity and reduce thedetection limit. Thesystemic approach includes the study of innovativepre-concentration materials, micromachining of GC componentsand devices, the fabrication andcharacterization ofcomplete system prototypes aswellasthedevelopment ofapplication-specific control electronics.