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Annealing of hole traps in hydrogen-ion-implanted n-GaN
Annealing of hole traps in hydrogen-ion-implanted n-GaN
2019
Syun Ito
Yutaka Tokuda
Shiojima Kenji
Jyoji Ito
Takahide Yagi
Keywords:
Analytical chemistry
Ion implantation
Annealing (metallurgy)
Hydrogen ion
Materials science
Correction
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