INVESTIGATION OF Sr-Ru-O/Ru MULTILAYER-ELECTRODES PREPARED BY MOCVD

ABSTRACT We proposed tailored metal organic chemical vapor deposition (MOCVD)-SrRuO3/Ru electrode for 3D ferroelectric capacitors to prevent the Ru diffusion to Pb(Zr,Ti)O3 [PZT] together with the formation of coherent interfaces with PZT due to the same perovskite structure. The effects of the Sr/(Sr+Ru) ratio on the crystallinity, surface roughness and the electrical properties of PZT films prepared on Sr-Ru-O/Ru bottom electrodes were investigated together with those of Sr-Ru-O layers prepared on Ru. PZT films prepared on Sr-Ru-O layers with the Sr/(Sr+Ru) ratio (x) of x = 0.50 showed the lower leakage current density and the larger remanent polarization than those with x = 0.30 and 0.60.