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Hydrogen Treatment of Gold Contact on Silicon
Hydrogen Treatment of Gold Contact on Silicon
2019
A. Vasiljev
О. I. Kozonushchenko
T.A. Vasyliev
V. V. Zhuravel
T.P. Doroshenko
Keywords:
Chemical engineering
Hydrogen
Materials science
Silicon
Electrical resistivity and conductivity
Inorganic chemistry
hydrogen treatment
Correction
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